Epitaxy
Physical Principles and Technical Implementation, Springer Series in Materials Science 62
Herman, Marian A/Richter, W/Sitter, Helmut
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Zusatztext
Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxys coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.
Weitere Details
Erschienen: 01.12.2010
Umfang: xv, 525 S., 303 s/w Illustr., 525 p. 303 illus.
Sprache: ENG
Einband: KT
ISBN/EAN: 9783642087370
Umbreit-Nr.: 1561089
